Mask aligner
Vacuum hard contact: the printing
Printing resolution could be from 0.8
(NUV) and 0.4um (DUV)
With proximity mode: the printing resolution is 2~5um
Other then Standard system,
We could build up Customized system for you!!
Alignment Fixture:
Mask vacuum chuck: 4", 5", 7", 9" or Larger
Wafer(substrate) vacuum chuck: round or Square 2", 4", 6" 8", Larger all with multi substrate and pre-alignment pin
With Proximity, Hard , Soft Contact mode
X, Y axisadjustment range: 12mm with resolution 1um (Option 0.1um)
Θ axis adjustment range: ±3° in Theta with 0.001° increment
Z axis adjustment range: 5mm, resolution 2um (Option 0.1um)
Mask vacuum chuck: 4", 5", 7", 9" or Larger
Wafer(substrate) vacuum chuck: round or Square 2", 4", 6" 8", Larger all with multi substrate and pre-alignment pin
With Proximity, Hard , Soft Contact mode
X, Y axisadjustment range: 12mm with resolution 1um (Option 0.1um)
Θ axis adjustment range: ±3° in Theta with 0.001° increment
Z axis adjustment range: 5mm, resolution 2um (Option 0.1um)
