19 x 2 CCS-MOCVD system
Close Coupled Showerhead system, larger production applications, GaAs/InP, or GaN (Q4 2000) applications
Capacity: 19x2” (or 7x3” or 4x4” or 1x6”)
lEpiTor II systems:
horizontal reactor systems, IR heated, mostly used for research applications
Capacity: 1or 2x2” with/without gas foil rotation
horizontal reactor systems, IR heated, mostly used for research applications
Capacity: 1or 2x2” with/without gas foil rotation
