Address: 1f, No. 5-2, Industry E. Rd., Ix, Science-Based Industial Park, Hsin-Chu, Taiwan
Tel: +886-3-5794340
FAX: +886-3-5794331
Est. Year: 1998
Capital: NT$ 200,000,000
Board Chairman: Morrison Liang
General Manager: K. H. Tsai
Sales Manager: Michael Lu

Products:
inductively copuled plasma-hight density plasma etcher, reative ion etcher, plasma enhanced chemical vapor deposition, plasma surface modification, plasma photoresist stripper, industively coupled plasma-high density plasma chemical vapor deposition.