Address: 1F, No. 17, R&D Rd., 2, Sciencebased Industrial Pard, Hsinchu, Taiwan, R.O.C.
Tel: +886-3-5779393
FAX: +886-3-5779191
Est. Year: 1997
Capital: NT$ 75,000,000
Board Chairman: Satoru Taniguchi
General Manager: Hilton C. P. Tai

Products:
plasma etch system (for semiconductor device and lcdmanufacturing), plasma ashing system (for semiconductor device and LCD manufacturing), other semiconductor manufacturing equipments.