Implanter Power supply/Circuit board/Mechanical parts
1.Filament P.S PN:1214110
2.Arc P.S PN:1214120
3.Cathode P.S PN:1214130
4.Source Magnet P.S PN:2100222
5.P-shower Filament P.S PN:1214460
6.Source Filament P.S PN:2100188
7.RFG3001/3000/2K2V/1250
8.EMS serious P.S
Parts
1.HE manipulator PN:11031510/1191871
2.GSD manipulator
PN:1153600/1182634/1181633
3.LE manipulator PN:11A9795
4.HE/VHE resonator overhaul PN:11000370
5.HE/VHE resonator DI board PN:1522270
6.HE/VHE Quadruple overhaul
7.Phase monitor box PN:1178490/11039040
8.In-air robot PN:11029370/11S7452
9.Vacuum cassette PN:1180500/11029990
10.Y-scan ball screw PN:1907720
11.Spindle PN:1180900/1193490
1.HE manipulator PN:11031510/1191871
2.GSD manipulator
PN:1153600/1182634/1181633
3.LE manipulator PN:11A9795
4.HE/VHE resonator overhaul PN:11000370
5.HE/VHE resonator DI board PN:1522270
6.HE/VHE Quadruple overhaul
7.Phase monitor box PN:1178490/11039040
8.In-air robot PN:11029370/11S7452
9.Vacuum cassette PN:1180500/11029990
10.Y-scan ball screw PN:1907720
11.Spindle PN:1180900/1193490
