Axcelis Implanter Mechanical parts overhaul
1.HE manipulator PN:11031510/1191871
2.GSD manipulator PN:1153600/1182634/1181633
3.LE manipulator PN:11A9795
4.HE/VHE resonator overhaul PN:11000370
5.HE/VHE resonator DI board PN:1522270
6.HE/VHE Quadruple overhaul
7.Phase monitor box PN:1178490/11039040
8.In-air robot PN:11029370/11S7452
9.Vacuum cassette PN:1180500/11029990
10.Y-scan ball screw PN:1907720
11.Spindle PN:1180900/1193490
FIXTOOL TECHNOLOGY LIMIT COMPANY
No. 298-7, Sec. 5, Huanbei Rd., Zhubei City, Hsinchu County 302, Taiwan (R.O.C.)
Tel: +886-3-6562062
Fax: +886-3-6562062
Cell: +886-928700758
