橢圓偏光儀 SE200BA
* Wavelength resolution: 1 nm
* Spot Size: 1 to 5 mm variable
* Incident Angle Range: 10 to 90 degree
* Incident Angle Change Resolution: 0.01 degree
* Sample Size: up to 300 mm in diameter
* Substrate Size: up to 20mm thick
* Measurable thickness range*: 0 nm to 30 µm
* Measurement Time: ~ 1s/Site
* Accuracy*: better than 0.25%
* Repeatability*: 1 Å
** SE200 tool covers a very broad wavelength range, from deep ultra-violet (DUV) to visible to near infrared (250 to 1100nm), a standard configuration. **
